Oxidation of Amorphous BON Thin Films Grown by RF-PECVD
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Korean Journal of Materials Research
سال: 2004
ISSN: 1225-0562
DOI: 10.3740/mrsk.2004.14.10.683